Omron Omron MEMS Flow Sensors As a new generation of fuel cell system components that mitigate environmental burdens, MEMS flow sensors play an important role. The principle of fuel cell is to mix the hydrogen contained in the city gas with oxygen, the need for hydrogen and oxygen in the best mixing ratio of the case of combustion to produce a chemical reaction for power generation. In order to maximize power generation efficiency. In order to achieve this goal, the need to play MEMS flow sensor high-precision test technology.
Omron uses the original ultra-fine processing technology, developed with a flow rate detection components equipped with MEMS flow sensor. With the proud of the world's highest level of sensitivity, even 1 mm / s gas flow rate can also be accurately detected. With the popularity of fuel cells, Omron small, high-performance MEMS flow sensor applications expectations are also rising. In order to detect a small flow rate, it is necessary to reduce the MEMS flow sensor chip installed in the MEMS flow sensor detection site. By giving full play to Omron's original high-precision machining technology, the world's smallest size (1.55 mm x 1.55 mm, 0.4 mm thick) is created. The principle of the test as shown in the absence of gas flow in the case of the heater as the center, the temperature distribution symmetrical; if the gas flow, the wind will become hot below the heater exhausted the top of the wind will be cold , Resulting in temperature imbalance. This temperature difference is used as the electromotive force difference between the two thermocouples and can be used to detect flow rate and flow rate. In addition, through the application of Omron's original etching technology, even this ultra-fine MEMS, but also high-precision to achieve high-quality mass production. With this high degree of MEMS productivity, Omron has significantly reduced product costs, not only in fuel cells, but also in a wide range of applications such as air-cooled conditions for precision equipment.